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Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 8, 页码: 13616-13629
作者:  D. Z. Shan;  N. X. Xu;  J. S. Gao;  N. T. Song;  H. Liu
收藏  |  浏览/下载:0/0  |  提交时间:2023/06/14
Deep investigation of two-dimensional structure arrays formed on Si surface 期刊论文
Applied Surface Science, 2022, 卷号: 605, 页码: 8
作者:  R. Y. Li;  X. Y. Li;  T. T. Zou;  W. F. Fu;  J. Xing
收藏  |  浏览/下载:0/0  |  提交时间:2023/06/14
Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching 期刊论文
Applied Surface Science, 2022, 卷号: 589, 页码: 10
作者:  X. Y. Li;  R. Y. Li;  Z. Yu;  J. Xing;  W. C. Kong
收藏  |  浏览/下载:1/0  |  提交时间:2023/06/14
Absorption enhancement in nanostructured silicon fabricated by self-assembled nanosphere lithography 期刊论文
Optical Materials, 2017, 卷号: 70
作者:  Li, Q.;  J. S. Gao;  Z. Z. Li;  H. G. Yang;  H. Liu
收藏  |  浏览/下载:17/0  |  提交时间:2018/06/13
Improved metal assisted chemical etching method for uniform, vertical and deep silicon structure 期刊论文
Journal of Micromechanics and Microengineering, 2017, 卷号: 27, 期号: 5
作者:  Miao, B.;  J. Zhang;  X. Z. Ding;  D. M. Wu;  Y. H. Wu
收藏  |  浏览/下载:14/0  |  提交时间:2018/06/13


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