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Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering 期刊论文
MATERIALS LETTERS, 2006, 卷号: 60, 期号: 15, 页码: 1809-1812
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Copper nitride thin film prepared by reactive radio-frequency magnetron sputtering 期刊论文
JOURNAL OF APPLIED PHYSICS, 2005, 卷号: 98, 期号: 10, 页码: -
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