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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 专题：大连理工大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Analysis of Laminar Flow Over a Non-Conventional Random Rough Surface Based on Lattice Boltzmann Method 期刊论文 JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 2012, 卷号: 134, 页码: - 作者:  Zhou, Ping;  Guo, Dongming;  Kang, Renke;  Jin, Zhuji 收藏  |  浏览/下载：5/0  |  提交时间：2019/12/13 lubricant flow  rough surface  chemical mechanical planarization  lattice Boltzmann method   Effect of conditioning parameters on surface non-uniformity of polishing pad in chemical mechanical planarization 期刊论文 Key Engineering Materials, 2009, 卷号: 389-390, 页码: 498-503 作者:  Qin N.;  Guo D.M.;  Kang R.K.;  Huo F.W. 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/24 Effect of Conditioning Parameters on Surface Non-uniformity of Polishing Pad in Chemical Mechanical Planarization 会议论文 11th International Symposium on Advances in Abrasive Technology, Awaji City, JAPAN, 2009-01-01 作者:  Qin, N.;  Guo, D. M.;  Kang, R. K.;  Huo, F. W. 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/24 Conditioner  Polishing pad  Rotation direction  Rotation speed and speed ratio  Non-uniformity   Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarization 会议论文 International Conference on Surface Finishing Technology and Surface Engineering (ICSFT2006), Dalian, PEOPLES R CHINA, 2006-01-01 作者:  Wang, C. L.;  Jin, Z. J.;  Kang, R. X. 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/27 chemical mechanical planarization (CMP)  kinematic forms  material removal rate  non-uniformity  numerical calculation   Corrosion inhibiting effect on copper chemical mechanical planarization (CMP) in Fe(NO3)(3) based slurries 期刊论文 ADVANCES IN ABRASIVE TECHNOLOGY VIII, 2005, 卷号: 291-292, 页码: 395-400 作者:  Guo, DM;  Li, XJ;  Jin, ZJ;  Kang, RK 收藏  |  浏览/下载：1/0  |  提交时间：2020/01/02 ULSI  CMP  slurry  inhibitor