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科研机构
西安交通大学 [21]
内容类型
会议论文 [17]
期刊论文 [4]
发表日期
2019 [1]
2018 [1]
2017 [5]
2016 [3]
2015 [6]
2013 [2]
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专题:西安交通大学
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Wafer-level fabrication of low power consumption integrated alcohol microsensor
期刊论文
MICRO & NANO LETTERS, 2019, 卷号: 14, 页码: 11-16
作者:
Wang, Hairong
;
Wang, Mengya
;
Lei, Weitao
;
Chen, Xiaowei
;
Huang, Hao
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2019/11/19
nanocomposites
electrodes
membranes
alcohol detection
sputter deposition
organic compounds
suspensions
gas sensors
temperature sensors
power 39
microsensors
microelectromechanical systems micromachining technology
wafer-level sensor chips
electrochemical electrodes
micromachining
TiO2-SnO2
magnetron sputtering
temperature measurement
power consumption
suspended membrane
power measurement
0 mW
nanosensors
titanium compounds
low power consumption integrated alcohol microgas sensor
microheater
wafer-level fabrication
tin compounds
High-temperature Fabry-Perot interferometer based on mode analysis
期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 页码: 198-201
作者:
Zhao, Na
;
Lin, Qijing
;
Jiang, Weile
;
Jiang, Zhuangde
;
Wu, Zirong
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/11/19
chemical property
Fabry-Perot interferometers
fast Fourier transforms
fast Fourier transform spectrum
fibre optic sensors
FPI transmission spectrum
higher order model
high-temperature Fabry-Perot interferometer
high-temperature measurement
mode analysis
optical fibre Fabry-Perot interferometer
spatial frequency spectrum
spectral methods of temperature measurement
temperature changes
Micro-Fabricated Packed Metal Gas Preconcentrator for Low Detection Limit Exhaled VOC Gas Measurements
会议论文
作者:
Han, Baoqing
;
Wu, Guishan
;
Wang, Hairong
;
Wang, Jiuhong
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Vacuum diffusion welding (VDW)
Metal gas preconcentrator (MGP)
Laser etching technology (LET)
Sorbent
VOC
The Micro Hydrogen Sensor Chip with Low Power Consumption
会议论文
作者:
Wang, Hairong
;
Wang, Mengya
;
Chen, Xiaowei
;
Han, Baoqing
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/11/26
Low power consumption
Mass production
MEMS
Integrated H2 sensor
A Fabry-Perot interferometer for high temperature measurement based on mode analysis
会议论文
作者:
Zhao, Na
;
Lin, Qijing
;
Jing, Weixuan
;
Jiang, Weile
;
Wu, Zirong
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/11/26
in fiberFabry-Perot interferometer
fast Fourier transform
temperature sensing
Measurement Study of Residual Stress on Tungsten-Rhenium Thin Film Thermocouples by Nanoindentation Technology
会议论文
作者:
Tian, Bian
;
Yu, Qiuyue
;
Zhang, Zhongkai
;
Lin, Qijing
;
Zhao, Na
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
Residual stress
TFTCs
Temperature sensor
A NOVEL MEMS FORCE SENSOR BASED ON LATERALLY MOVABLE GATE ARRAY FIELD EFFECT TRANSISTOR(LMGAFET)
会议论文
作者:
Gao, Wendi
;
Zhao, Libo
;
Xia, Zhuangde Jiang Yong
;
Guo, Xin
;
Zhao, Zhiming
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
force sensor
FET
biophysical properties measurement
MEMS
Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing
期刊论文
MICRO & NANO LETTERS, 2016, 卷号: 11, 期号: [db:dc_citation_issue], 页码: 326-331
作者:
Cheng, Rongjun
;
Zhao, Yulong
;
Li, Cun
;
Li, Bo
;
Zhang, Qi
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
micromachined resonant pressure sensor
quartz resonator
micropressure measurement
piezoelectric excitation
electronics packaging
double enhancement beam
micromachining
quality factor
micromachined diaphragm
microsensors
crystal resonators
piezoelectric transducers
finite element method
finite element analysis
piezoelectric sensor
temperature 293 K to 298 K
diaphragms
Q-factor measurement
pressure sensors
pressure-10 kPa to 10 kPa
self-excitation circuit design
Analysis of the 3ω method for the measurement of fluid thermal properties
会议论文
作者:
Huang, Xiangxiang
;
Hebibul, Rahman
;
Zhao, Libo
;
Xu, Tingzhong
;
Zhao, Yulong
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
Approximate solution
Dielectric layer
Dimensionless heating
Heat conduction models
Measurement frequency
Numerical results
Ratio of length to widths
Three-dimensional model
Analysis of the 3 omega Method for the Measurement of Fluid Thermal Properties
会议论文
作者:
Huang, Xiangxiang
;
Hebibul, Rahman
;
Zhao, Libo
;
Xu, Tingzhong
;
Zhao, Yulong
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
Thermal property
3 omega
Numerical analysis
Dielectric layer
Partial differential equations
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