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MEMS scanning mirror with vertical comb actuator based on latching technique 其他
2013-01-01
Chen, Qing Hua; Li, Yan Mei; Chen, Ying Jun; Wu, Wen Gang
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/17
A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors 其他
2012-01-01
Wang, Jiankun; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing 期刊论文
journal of micro nanolithography mems and moems, 2012
Wang, Jiankun; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13
Wafer level bulk titanium ICP etching using SU8 as an etching mask 期刊论文
journal of micromechanics and microengineering, 2009
Zhao, Gang; Shu, Qiong; Tian, Yao; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Micro torsion mirror actuated by compound electrostatic driving structure 期刊论文
sensors and actuators a physical, 2007
Wu, W. G.; Chen, Q. H.; Yan, G. Z.; Yin, D. Q.; Chen, Z. Y.; Hao, Y. L.; Xu, A. S.; Wang, Y. Y.
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10
基于垂直扭转梳齿驱动结构的硅微机械扭转微镜的设计加工与表征 期刊论文
纳米技术与精密工程, 2006
栗大超; 吴文刚; 袁勇; 郝一龙; 胡小唐
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/11
Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors 其他
2006-01-01
Liu, Xuesong; Yang, Zhengchuan; Yan, Guizhen; Fan, Jie; Ding, Haitao; Liu, Ye
收藏  |  浏览/下载：7/0  |  提交时间：2015/11/16
Design, fabrication and characterization of novel micromirror with vertical torsion comb driver 期刊论文
nami jishu yu jingmi gongchengnanotechnology and precision engineering, 2006
Li, Da-Chao; Wu, Wen-Gang; Yuan, Yong; Hao, Yi-Long; Hu, Xiao-Tang
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
复合静电驱动结构致动的内旋转微镜 期刊论文
半导体学报, 2005
吴文刚; 陈庆华; 尹冬青; 闫桂珍; 陈章渊; 郝一龙; 徐安士
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/12
Hybrid electrostatic actuator for micromirror tilting 其他
2005-01-01
Wu, WG; Chen, QH; Yan, GZ; Hao, YL; Yin, DQ; Chen, ZY; Xu, AS
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13

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