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科研机构
北京大学 [66]
厦门大学 [6]
内容类型
其他 [72]
发表日期
2016 [2]
2015 [10]
2014 [5]
2013 [5]
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2011 [5]
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Fabrication and Characterization of Fine Pitch TSV Integration with Self-aligned Backside Insulation Layer Opening
其他
2016-01-01
Guan, Yong
;
Zeng, Qinghua
;
Chen, Jing
;
Ma, Shenglin
;
Jin, Yufeng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2017/12/03
TSV
3D packaging
sidewall insulation
electrical properties
CMP
THROUGH-SILICON VIAS
STACKING TECHNOLOGY
LINER
Nanoscale Ge Fin Etching Using Inductively Coupled Plasma for Ge-based Multi-gate Devices
其他
2016-01-01
Bingxin Zhang
;
Xia An
;
Yuxuan Xia
;
Ming Li
;
Meng Lin
;
Peilin Hao
;
Xing Zhang
;
Ru Huang
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
roughness
etching
fabrication
uniformity
inductively
optimizing
layout
illustrated
scaling
removed
roughness
etching
fabrication
uniformity
inductively
optimizing
layout
illustrated
scaling
removed
Roll-to-roll production and etching-free transfer of graphene for high-performance flexible transparent electrodes
其他
2015-01-01
Bing Deng
;
Zhongfan Liu
;
Hailin Peng
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2017/12/03
roll-to-roll
graphene
chemical vapor deposition
transfer
transparent electrode
roll-to-roll
graphene
chemical vapor deposition
transfer
transparent electrode
Parylene C autofluorescence for on-chip highest processing temperature sensing
其他
2015-01-01
Zhang, Lingqian
;
Liu, Yaoping
;
Yang, Fang
;
Wang, Wei
;
Zhang, Dacheng
;
Li, Zhihong
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2017/12/03
Perfect shuffle transform based on subwavelength binary blazed grating
其他
2015-01-01
Yang, Junbo
;
Xu, Suzhi
;
Zhang, Jingjing
;
Wu, Wenjun
;
Lu, Huanyu
;
Huang, Jie
;
Chen, Dingbo
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
perfect shuffle transform
binary blazed grating
diffraction efficiency
cross talk
rigorous coupled-wave analysis
finite difference time domain
INTERCONNECTION
A novel MOS radiation dosimeter based on the MEMS-made oxide layer
其他
2015-01-01
Liu, H.
;
Yang, Y.
;
Zhang, J.
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2017/12/03
Parylene C Autofluorescence for On-chip Highest Processing Temperature Sensing
其他
2015-01-01
Zhang, Lingqian
;
Liu, Yaoping
;
Yang, Fang
;
Wang, Wei
;
Zhang, Dacheng
;
Li, Zhihong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
Parylene C
fluorescence
temperature sensing
Improvement of DRIE simulation method for process development application
其他
2015-01-01
Du, Hong
;
Yu, Min
;
Qi, Lin
;
Zhu, Zhiyuan
;
Wang, Hao
;
Zhang, Haixia
;
Jin, Yufeng
;
Shi, Baohua
;
Zhang, Zhao
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2017/12/03
DRIE simulation
coil power
model optimization
simulator application
Improvement of DRIE simulation method for process development application
其他
2015-01-01
Du, Hong
;
Yu, Min
;
Qi, Lin
;
Zhu, Zhiyuan
;
Wang, Hao
;
Zhang, Haixia
;
Jin, Yufeng
;
Shi, Baohua
;
Zhang, Zhao
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
A high-performance and cost-effective grating coupler for ultraviolet light
其他
2015-01-01
Zhang, Jingjing
;
Chen, Dingbo
;
Yang, Junbo
;
Chang, Shengli
;
Zhang, Hailiang
;
Jia, Honghui
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2017/12/03
Integrated Optics
grating coupler
ultraviolet
SPLITTER
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