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Micro/nano film getters for vacuum maintenance of MEMS 其他
2007-01-01
Jin, Yufeng; Tang, Hao; Wang, Zhenfeng
收藏  |  浏览/下载:3/0  |  提交时间:2015/11/13
Analysis of swelling behavior of polymeric membranes in solutions using UNIFAC-FV-HB activity coefficient model 其他
2004-01-01
Liu, QL; Li, B; 刘庆林
收藏  |  浏览/下载:2/0  |  提交时间:2015/07/22
An investigation on NEG thick film for vacuum packaging of MEMS 其他
2003-01-01
Jin, Y.F.; Wang, Z.P.; Zhao, L.; Lim, P.C.; Wei, J.
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13


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