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Design and fabrication of an integrated curved grating microspectrometer 会议论文
上海, 2018
作者:  Hongtao Feng;  Guodong Zhang;  Weiliang Shu;  Baoyue Zhang;  Hui Lin
收藏  |  浏览/下载:14/0  |  提交时间:2019/01/31
An integrated microfluidic spectrometer with curved grating design 会议论文
大连, 2018
作者:  Hongtao Feng;  Guodong Zhang;  Weiliang Shu;  Baoyue Zhang;  Hui Lin
收藏  |  浏览/下载:16/0  |  提交时间:2019/01/31
Polymer Microring Resonators for Biosensing Applications by Nanoimprint Lithography 会议论文
17th International Conference on Transparent Optical Networks (ICTON 2015), Budapest, HUNGARY, 2015-07-05
作者:  Morarescu, R.;  Pal, P. K.;  Han, X.;  Zhao, M.;  Bienstman, P.
收藏  |  浏览/下载:7/0  |  提交时间:2019/12/09
Simulation of nanoimprint based on PSQ-L polymer 会议论文
15th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT) / 4th International Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT), Tianjin, PEOPLES R CHINA, 2013-11-03
作者:  Guo, Xin;  Sun, Mingzhu;  Zhao, Mingshan;  Zhao, Xin
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/09
SERS-active Ag decorated polymer nanorod substrate fabricated by the combination of photochemical reduction and nanoimprint technology 会议论文
2014 3rd International Conference on Material Science, Environment Science and Computer Science, MSESCS 2014, Wuhan, China, January 11, 2014 - January 12, 2014
作者:  Liu, Sisi*;  Xu, Zhimou;  Sun, Tangyou;  Zhao, Wenning;  Wu, Xinghui
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/23
The next generation microelectronics craft technique: Nanoimprint lithography 会议论文
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings, 2013
作者:  Wei, Jiang;  Nan, Wang;  Wei, Yan;  Song, Hu;  Xiao-Qiong, Pu
收藏  |  浏览/下载:17/0  |  提交时间:2016/11/24
Fabrication of Nanoporous Arrays from Photosensitive Organic-Inorganic Hybrid Materials by Using an UV Soft Nanoimprint Technique 会议论文
作者:  Zhang, Xuehua;  Que, Wenxiu;  Hu, Jiaxing;  Chen, Jin;  Zhang, Jin
收藏  |  浏览/下载:6/0  |  提交时间:2019/12/10
Large-scale Fabrication of Plasmonic Au Nanostructures with Surface-enhanced Raman Scattering (SERS) effect Prepared by Nanoimprint Lithography 会议论文
第三届纳米化学前沿论坛(Frontiers of Nanochemistry-2013), 2013-06-05
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收藏  |  浏览/下载:2/0  |  提交时间:2019/12/23
A force-decoupled compound parallel alignment stage for nanoimprint lithography 会议论文
2013-12-01
作者:  Sun, Xiantao;  Chen, Weihai;  Zhou, Rui;  Chen, Wenjie;  Zhang, Jianbin
收藏  |  浏览/下载:1/0  |  提交时间:2020/01/06
A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity (EI CONFERENCE) 会议论文
2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom
Li S.; Shi L.; Yang Z.; Huang X.; Zhang Z.; Gao F.; Guo Y.; Yu W.; Du J.
收藏  |  浏览/下载:13/0  |  提交时间:2013/03/25
To improve the fidelity of nanostructures in transfer process  a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. 2012 IEEE.  


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