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浏览/检索结果: 共4条，第1-4条 帮助 限定条件 内容类型：会议论文    专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China Zhao Y.; Gong Y.; Li S.; Zhang W. 收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25 Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.   Angular rate of test table based on high-speed non-contact measurement (EI CONFERENCE) 会议论文 9th International Conference on Electronic Measurement and Instruments, ICEMI 2009, August 16, 2009 - August 19, 2009, Beijing, China Yang L.; Shen X.; Zhang N.; Yang Y.; Zhao Y. 收藏  |  浏览/下载：28/0  |  提交时间：2013/03/25 This article will introduces a high-speed non-contact method that can measures the angular rate of a test table though an objective perspective. This method adopts a collimator tube that can be measured as a target fixed to the test table  and the target corresponds to the angular position of the test table. In the process of the table rotating  the camera will to keep track of the objective at a high speed. Due to the high sampling frequency of the high-speed camera  instantaneous angular rate of test table can be measured. With pixel subdivision technology  its measuring accuracy can be up to 0.02 pixels. We use this methods measured a low-speed test table's angular rate and analyzed the data. The error analysis shows when the rate of the test table is 0.20/s  the accuracy of the method can achieve 0.0220%. 2009 IEEE.   Geometrical modulation transfer function of different active pixel of CMOS APS (EI CONFERENCE) 会议论文 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, November 2, 2005 - November 5, 2005, Zian, China Li J.; Liu J.; Hao Z. 收藏  |  浏览/下载：18/0  |  提交时间：2013/03/25 The geometrical Modulation Transfer Function (MTF) of CMOS APS (active pixel sensor) is analyzed in this paper. Advanced APS have been designed and fabricated where different pixel shapes such as square  rectangle and L shape  were placed  because the amplifier circuit and other function circuits inter pixel of APS take up some pixel area. MTF is an important figure of merit in focal plane array imaging sensors. Research on analyzing the MTF for the proper pixel shape is currently in progress for a centroidal configuration of a target position. MTF will give us a more complete understanding of the tradeoffs opposed by the different pixel designs and by the signal processing conditions. Based on image sensor sampling and reconstructing model  the MTF expression of any active pixel shape has been deduced in this paper. According to actual pixel shape  three different active area pixels were analyzed  they were square  rectangle  and L shape  their Fill Factor (FF) is 30%  44% and 55%  respectively. Results of simulation experiments indicate that different pixel geometrical characteristics contribute significantly to the figures of their MTF. Different geometrical shape of active sensitive area of pixel and different station in pixel would influence MTF figures. The analysis results are important in designing better APS pixel and more important in analyzing imaging system performance of APS subpixel precision system.   Abrupt sensor fault diagnosis based on wavelet network (EI CONFERENCE) 会议论文 2006 IEEE International Conference on Information Acquisition, ICIA 2006, August 20, 2006 - August 23, 2006, Weihai, Shandong, China Zhang H.; Chen T.; Li W. 收藏  |  浏览/下载：10/0  |  提交时间：2013/03/25 The possible faults of a sensor may be classified as abrupt (sudden) faults and incipient (slowly developing) faults. This paper focuses on the abrupt faults of a sensor. Due to the limited number of scales  a single wavelet amplitude map has not enough scales to describe all details of the signal. The sampling grid in the scale direction is rather sparse  Some of the fault information will be leaked under such sparse grid. To make up for the deficiency of scalar orthogonal wavelet transform in the application of abrupt fault diagnosis  multiwavelet packets transform was introduced into the field of abrupt fault diagnosis. The distribution differences of the signal energy on decomposed multiwavelet scales of the signal before and after the fault occurring are extracted as the fault feature and used as the input of multi-dimensional wavelet network. A new model-free diagnostic method for isolating abrupt sensor faults is developed based on a proposed algorithm of multi-dimensional wavelet network constructing. The method has been proved to be quite effective in the detection of sensor abrupt fault. 2006 IEEE.