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长春光学精密机械与... [14]
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内容类型:会议论文
专题:长春光学精密机械与物理研究所
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Analysis of power spectral density as a performance metric for TMT M3
会议论文
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, AOMATT 2014, April 26, 2014 - April 29, 2014, Harbin, China
Yang F.
;
An Q.-C.
;
Wang F.-G.
;
Liu X.-Y.
收藏
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浏览/下载:14/0
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提交时间:2015/04/27
A novel Design measuring Method based on linearly polarized laser interference
会议论文
5th International Symposium on Photoelectronic Detection and Imaging, ISPDI 2013, June 25, 2013 - June 27, 2013, Beijing, China, June 25, 2013 - June 27, 2013
Cao Y.
;
Ai H.
;
Zhao N.
收藏
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浏览/下载:8/0
  |  
提交时间:2014/05/15
Data processing method of multi-position strap-down north seeking system based on SVD (EI CONFERENCE)
会议论文
2011 International Conference on Mechatronic Science, Electric Engineering and Computer, MEC 2011, August 19, 2011 - August 22, 2011, Jilin, China
Shen C.-W.
;
Liu C.
;
Yu S.-B.
;
Wang Z.-Q.
;
Li J.-R.
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浏览/下载:23/0
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提交时间:2013/03/25
With the aim to fit the sin wave curve of a multi-position strap-down north seeking system and to calculate the real north angle accurately
the principles of the system and the algorithm of singular value decomposition(SVD) are introduced. The factors influencing the measuring precision are also analyzed. Then
the algorithm is adopted to fit curves. Experimental results indicate that the singular value decomposition is very precise
for its error sum is 1.1102V
and the squared error is 2.8mV. Moreover
for phase angle measurement
measured six times in same direction
the squared error is 24 (1). The method based on SVD can satisfy the system precision requirements of curve-fitting north seeking systems. 2011 IEEE.
The Research of real time auto-recognition of the moire fringe (EI CONFERENCE)
会议论文
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Imaging Detectors and Applications, May 24, 2011 - May 26, 2011, Beijing, China
Wang M.-J.
;
Wu Z.-G.
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浏览/下载:15/0
  |  
提交时间:2013/03/25
Measuring the movement of raster by the method of moire fringe has the advantage of high sensitivity
high resolution and non-contacted measurement. The characteristic of moire fringe is that the image is white alternate with black
the angle of the stripes is uniform
the width of the stripes is uniform
the terminators of the stripes aren't clear. A fast method that can figure out the width and angle of the moire fringe precisely is put forward in this paper. It calculates the angle the stripes firstly. According to the principle of the minimum mean squared error (MMSE)
the closer a series of data is
the smaller the value of the MMSE will be. The method is described as follows: It takes the image's center as the origin
180 beelines pass through the origin with the same angle interval. it calculates the value of the minimum mean squared error of the 180 beelines and find out the least one among those
then the angle of the moire fringe comes out primarily. In order to improving the calculating precision of moire fringe
60 equal angles are divided in the neighborhood of the angle
then a precise angle of moire fringe is calculated according to the principle of the MMSE. After getting out the angle of the moire fringe
we begin to calculate the width of moire fringe. A line vertical with the moire fringe is drawn
and we can get the width of the moire fringe by the vertical line. In order to get over the influence of the noise
an effective area with the shape of diamond is selected in the image. The data of area is accumulated and projected according to the direction of moire fringe
and a sine curve come out. The width of moire fringe can be obtained by getting the position of the first wave crest
the position of the last wave crest and the number of wave crest. Experiments prove that the precision of the method put forward in this paper is enhanced in comparison with the traditional frequency method
the precision of width calculation achieves to 99.6% according to the evaluation indicators of width detection error. The computing speed is boosted largely compared with traditional method
and it can achieve with 15 ms
that satisfying the demand of real time. 2011 SPIE.
Research on the laboratory radiometric calibration of the thermal imager (EI CONFERENCE)
会议论文
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China
Lu Z.
;
Sun Q.
;
Wang J.
;
Lu Z.
;
Liu Y.
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浏览/下载:17/0
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提交时间:2013/03/25
The radiometric calibration of the thermal imager was investigated to build the relationship between the input radiance and the digital output to realize the temperature measurement. The radiometric calibration was implemented in the State Key Laboratory of Applied Optics. A standard black body source was served as radiation source. The response of the thermal imager to the input radiance was tested for different gains. The experimental results show that the average grey level of the output imaging is linear dependence of the input radiance. Because the radiance in the receiving wave range of the thermal imager is linear with the black body's temperature based on Planck's law of radiation
the average grey level of the output image is also linear with the black body's temperature after fitting a curve to the experiment data points. Then the relationship of the response and the gain was studied when the black body's temperature kept constant. The preliminary analysis of calibration data shows that the response of the thermal imager is linear and the average grey value of the image is directly proportion to the gain. According to the experimental results
the reference gains and the dynamic range of temperature measurement were obtained. Finally
the uncertainty influencing the calibration results was analyzed
the analysis shows the maximal uncertainty is 5.2%
which can meet the calibration requirement less than 10%. 2010 Copyright SPIE - The International Society for Optical Engineering.
Research on automatic Hartmann test of membrane mirror (EI CONFERENCE)
会议论文
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China
Zhong X.
;
Jin G.
;
Liu C.
;
Zhang P.
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浏览/下载:21/0
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提交时间:2013/03/25
Electrostatic membrane mirror is ultra-lightweight and easy to acquire a large diameter comparing with traditional optical elements
so its development and usage is the trend of future large mirrors. In order to research the control method of the static stretching membrane mirror
the surface configuration must be tested. However
membrane mirror's shape is always changed by variable voltages on the electrodes
and the optical properties of membrane materials using in our experiment are poor
so it is difficult to test membrane mirror by interferometer and null compensator method. To solve this problem
an automatic optical test procedure for membrane mirror is designed based on Hartmann screen method. The optical path includes point light source
CCD camera
splitter and diffuse transmittance screen. The spots' positions on the diffuse transmittance screen are pictured by CCD camera connected with computer
and image segmentation and centroid solving is auto processed. The CCD camera's lens distortion is measured
and fixing coefficients are given to eliminate the spots' positions recording error caused by lens distortion. To process the low sampling Hartmann test results
Zernike polynomial fitting method is applied to smooth the wave front. So low frequency error of the membrane mirror can be measured then. Errors affecting the test accuracy are also analyzed in this paper. The method proposed in this paper provides a reference for surface shape detection in membrane mirror research. 2010 Copyright SPIE - The International Society for Optical Engineering.
Graph fitting test method for the interpolation error of Moire fringe (EI CONFERENCE)
会议论文
9th International Conference on Electronic Measurement and Instruments, ICEMI 2009, August 16, 2009 - August 19, 2009, Beijing, China
Wan Q.
;
Sun Y.
;
She R.
;
Liang L.
;
Lu X.
;
Du Y.
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浏览/下载:22/0
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提交时间:2013/03/25
In order to realize the fast test for the interpolation error
the graph fitting test method for the interpolation error of Moire fringe is put forward in this paper. Firstly
the triangular wave Moire fringe photoelectric signal of the encoder whose phase difference is 90 are sampled to get the Lissajous graph of the two signals. Secondly
the single wave represented by the founded subsection function is used to fit the practical Moire fringe Lissajous graph. Then
the fitting result is tested to verify whether it satisfies the accuracy requirement. Lastly
the founded subsection function instead of the practical wave function is used to calculate the interpolation error. Using the graph fitting method to sample the Moire fringe single of 15-bits photoelectric encoder to get the interpolation error curve
the tested maximum interpolation error is 70" and the minimum error is - 69". Comparing with the interpolation error which is received from traditional test method
the change trend of the interpolation error curve is similar
and peak-peak value is almost equality. The results of experiment indicate that: the equipment is convenient and the examination method is efficient and feasible. The measure speed is fast and the manifestation result is intuitionistic. The system can be used in the working field. The method can avoid the speed influence and realize the dynamic interpolation error measure
which is significant for the research of encoder's dynamic accuracy characteristics. 2009 IEEE.
Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE)
会议论文
2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China
Chen X.
;
Liu W.
;
Kang Y.
;
Wei Z.
收藏
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浏览/下载:18/0
  |  
提交时间:2013/03/25
High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods
the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well
we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper
MTF exceeds diffraction limit
an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface
root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system
the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02
a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
Dynamic evaluation system for interpolation errors in the encoder of high precision (EI CONFERENCE)
会议论文
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, November 19, 2008 - November 21, 2008, Chengdu, China
Wan Q.-H.
;
Wu Y.-Z.
;
Zhao C.-H.
;
Liang L.-H.
;
Sun Y.
;
Jiang Y.
收藏
  |  
浏览/下载:24/0
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提交时间:2013/03/25
In order to measure dynamic interpolation errors of photoelectric encoder of high precision
the dynamic evaluation system of interpolation errors is introduced. Firstly
the fine Moire signal of encoder which is collected with the high-speed data gathering card into the computer is treated to equiangular data with the method of linear interpolation. Then
the analysis of harmonic wave with the FFT is processed. Compared with the standard signal
the dynamic interpolation errors of the encoder are calculated. Experimental results show that the precision of the dynamic evaluation system of interpolation errors is 0.1 %( pitch). The evaluation system is simple
fast
high precision
and can be used in the working field of the encoder. 2009 SPIE.
The cell thickness and twist angle measurement of twist nematic liquid crystal cell by rotation of a quarter-wave plate using Fourier analysis method
会议论文
2007
Cui H. Q.
;
Ling Z. H.
;
East China Normal Unviersity P.
收藏
  |  
浏览/下载:8/0
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提交时间:2013/03/28
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