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Integrated mach-zehnder micro-interferometer for gas trace remote sensing (EI CONFERENCE) 会议论文
ICO20: Remote Sensing and Infrared Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China
Chiarini M.; Bentini G. G.; Bianconi M.; Cerutti A.; Pennestri G.; Wang P.; She L.; Mazzoldi P.; Sada C.
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The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides: the phase shift between the two optical paths has been obtained  1mm 2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4m-1.1m) will be presented. The performance of the device  without moving parts  evaluated on standard radiation sources  by applying a suitable electric field. The whole device is 60mm long  demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications  has a 0.57times  spanning from Space Technology  Earth observation for Environment monitoring  to Safety and Security applications.  


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