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Directional transporting of water droplets on aluminum alloy substrate, comprises pretreating aluminum substrate, etching, preheating, coating photoresist on surface, photolithographic processing, UV exposing, and removing photoresist. 专利
申请日期: 2014-01-01, 公开日期: 2014-08-06
作者:  XU W LIU X YANG X SUN J
收藏  |  浏览/下载:9/0  |  提交时间:2019/12/11
Method for performing plane carbon preparation of flat carbon film membrane electrode, involves performing uniformly spin coating of photoresist on conductive substrate, and under protection of inert gas with certain pressure. 专利
申请日期: 2013-01-01, 公开日期: 2013-05-01
作者:  SHI K ZHANG H WANG C ZHAN D ZHANG Y
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/13
Low-cost micronano integrated structure manufacturing method, involves pressing micrometer quartz die with photoresist, developing to obtain micronano integrated structure, and packing integrated structure. 专利
申请日期: 2013-01-01, 公开日期: 2013-01-30
作者:  CHENG E YIN Z ZOU H
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/13
Microfabrication of SU-8 photoresist comprises grinding cleaned metal substrate and rotary coating SU-8 photoresist, exposing, baking, ultrasonically processing spin coating, developing SU-8 photoresist film, washing, and drying. 专利
申请日期: 2013-01-01, 公开日期: 2013-12-11
作者:  ZHAO M ZHAO S ZHANG X DU L WANG A
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/13
Method for manufacturing multi-layer micro inductance coil on silicon substrate of UV-lithography, electroplating, and molding, involves drying coating negative photoresist using negative photo-etching mask plate to obtain coil pattern. 专利
申请日期: 2012-01-01, 公开日期: 2012-10-10
作者:  JIANG F KOU J XU Z YIN J
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/18
Electrothermal drive photoresist i.e. SU-8 rubber, micro gripper manufacturing method, involves embedding micro gripper electrode in SU-8 rubber, and forming radiator hole on gripper body of micro gripper. 专利
申请日期: 2010-01-01, 公开日期: 2010-06-30
作者:  CHU J WANG W ZHANG C ZHANG R
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/24


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