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Scattering loss in silicon-on-insulator rib waveguides fabricated by inductively coupled plasma reactive ion etching 期刊论文
APPLIED PHYSICS LETTERS, 2004, 卷号: 85, 期号: 18, 页码: 3995-3997
Wang, YJ; Lin, ZL; Cheng, XL; Zhang, CS; Gao, F; Zhang, F
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