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Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD) 期刊论文
Nuclear Instruments and Methods in Physics Research B, 2011, 卷号: 269, 页码: 1871-1877
作者:  Zhang GA(张广安)
收藏  |  浏览/下载:11/0  |  提交时间:2012/09/24
The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition 期刊论文
Applied Physics Letters, 2008, 卷号: 93, 页码: 131920(1-3)
作者:  Zhang JY(张俊彦)
收藏  |  浏览/下载:13/0  |  提交时间:2013/03/28


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