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The chemical composition and bonding structureofB–C–N–H thin films deposited by reactive magnetron sputtering 期刊论文
Surface and Interface Analysis, 2009, 卷号: 41, 页码: 865-871
作者:  Zhang JY(张俊彦);  Yang SR(杨生荣);  Zhang JY(张俊彦)
收藏  |  浏览/下载:9/0  |  提交时间:2012/11/13
The influence of processing gas on the mechanical properties of sputtered B–C–N–H films 期刊论文
Applied Surface Science, 2009, 卷号: 255, 页码: 8575-8581
作者:  Zhang JY(张俊彦);  Zhang JY(张俊彦);  Yang SR(杨生荣)
收藏  |  浏览/下载:43/0  |  提交时间:2012/11/13
Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
作者:  Hao JY(郝俊英);  Xue QJ(薛群基);  Liu WM(刘维民)
收藏  |  浏览/下载:105/0  |  提交时间:2013/11/01


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