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科研机构
半导体研究所 [7]
内容类型
会议论文 [7]
发表日期
2008 [1]
2006 [3]
2004 [1]
1999 [2]
学科主题
半导体材料 [7]
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学科主题:半导体材料
内容类型:会议论文
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High epitaxial growth rate of 4H-SiC using TCS as silicon precursor
会议论文
9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008
Ji, G
;
Sun, GS
;
Ning, J
;
Liu, XF
;
Zhao, YM
;
Wang, L
;
Zhao, WS
;
Zeng, YP
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2010/03/09
Homoepitaxial growth and characterization of 4H-SiC epilayers by low-pressure hot-wall chemical vapor deposition
会议论文
international conference on silicon carbide and related materials (icscrm 2005), pittsburgh, pa, sep 18-23, 2005
Sun, GS (Sun, Guosheng)
;
Ning, J (Ning, Jin)
;
Gong, QC (Gong, Quancheng)
;
Gao, X (Gao, Xin)
;
Wang, L (Wang, Lei)
;
Liu, XF (Liu, Xingfang)
;
Zeng, YP (Zeng, Yiping)
;
Li, JM (Li, Jinmin)
收藏
  |  
浏览/下载:101/29
  |  
提交时间:2010/03/29
homoepitaxial growth
low-pressure hot-wall CVD
structural and optical characteristics
intentional doping
Schottky barrier diodes
Preparation and AFM characterization of self-ordered porous alumina films on semi-insulated gaas substrate
会议论文
11th conference on defects recognition imaging and physics in semiconductors, beijing, peoples r china, sep 13-19, 2005
Zhou HY
;
Qu SC
;
Wang ZG
;
Liang LY
;
Cheng BC
;
Liu JP
;
Peng WQ
收藏
  |  
浏览/下载:132/26
  |  
提交时间:2010/03/29
anodic alumina films
Optical and structural properties of ZnO films grown on Si(100) substrates by MOCVD - art. no. 60290G
会议论文
20th congress of the international-commission-for-optics, changchun, peoples r china, aug 21-26, 2005
Shen, WJ
;
Duan, Y
;
Wang, J
;
Wang, QY
;
Zeng, YP
收藏
  |  
浏览/下载:95/18
  |  
提交时间:2010/03/29
ZnO
MOCVD
thermal annealing
photoluminescence
x-ray diffraction
atomic force microscopy
PULSED-LASER DEPOSITION
THIN-FILMS
PHOTOLUMINESCENCE
MECHANISMS
EPITAXY
CVD
SI
Homoepitaxial growth and MOS structures of 4H-SiC on off oriented n-type (0001)Si-faces
会议论文
7th international conference on solid-state and integrated circuits technology, beijing, peoples r china, oct 18-21, 2004
Sun, GS
;
Ning, J
;
Zhang, YX
;
Gao, X
;
Wang, L
;
Zhao, WS
;
Zeng, YP
;
Li, JM
收藏
  |  
浏览/下载:208/60
  |  
提交时间:2010/03/29
4H-SiC
LPCVD homoepitaxial growth
thermal oxidization
MOS structures
HOT-WALL CVD
High temperature annealing behaviors of luminescent SIOx : H films
会议论文
symposium e on luminescent materials at the 1999 mrs spring meeting, san francisco, ca, apr 05-08, 1999
Ma ZX
;
Xiang XB
;
Sheng SR
;
Liao XB
;
Shao CL
;
Umeno M
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2010/10/29
RAMAN-SPECTRA
SILICON
PHOTOLUMINESCENCE
Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing
会议论文
symposium on amorphous and microcrystalline silicon technology-1998, at the mrs spring meeting, san francisco, ca, apr 14-17, 1998
Wang YQ
;
Liao XB
;
Diao HW
;
He J
;
Ma ZX
;
Yue GZ
;
Shen SR
;
Kong GL
;
Zhao YW
;
Li ZM
;
Yun F
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2010/10/29
AMORPHOUS-SILICON
CRYSTALLIZATION
TRANSISTORS
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