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Research on ultra-smooth collimation separation of silicon wafer by multiple lasers 会议论文
Suzhou, China, 2020-05-01
作者:  Youwang, Hu;  Ming, Li;  Qinqin, Xie;  Xiaoyan, Sun
收藏  |  浏览/下载:7/0  |  提交时间:2020/07/28
Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 15, 页码: 13
作者:  C. Sun,S. Cai,Y. S. Liu and Y. F. Qiao
收藏  |  浏览/下载:2/0  |  提交时间:2021/07/06
Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 27, 页码: 8465-8471
作者:  X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun
收藏  |  浏览/下载:2/0  |  提交时间:2021/07/06


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