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Model MTF for the mosaic window 期刊论文
Journal of Modern Optics, 2017, 卷号: 64, 期号: 19
作者:  Xing, Z. C.;  Y. F. Hong and B. Zhang
收藏  |  浏览/下载:16/0  |  提交时间:2018/06/13
New Measuring Method of Diffraction Efficiency for Concave Grating Based on Fourier Optics Principle 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 4
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  Bayanheshig;  X. F. Yao
收藏  |  浏览/下载:21/0  |  提交时间:2018/06/13
Coude light path alignment scheme with spatial mechanism 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2017, 卷号: 46, 期号: 8
作者:  Zhang, L.;  X. Han;  Y. Cao and W. Wang
收藏  |  浏览/下载:16/0  |  提交时间:2018/06/13
Beam drift error and control technology for scanning beam interference lithography 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 14
作者:  Wang, W.;  Y. Song;  S. Jiang;  M. Z. Pan and Bayanheshing
收藏  |  浏览/下载:14/0  |  提交时间:2018/06/13
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
收藏  |  浏览/下载:53/0  |  提交时间:2018/06/13


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