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Atomic Layer Etching of Silicon and Silicon Dioxide Under Pulsed RF Substrate Bias 会议论文
ICMAP 2014: International Conference of Microelectronics and Plasma Technology
作者:  Dai ZL(戴忠玲);  Wang YN(王友年)
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/11
Investigation on properties of magnesia grinding wheels used in silicon wafer grinding 会议论文
17th International Symposium on Advances in Abrasive Technology, ISAAT 2014
作者:  Dong ZG(董志刚);  Gao S(高尚);  Kang RK(康仁科);  Guo DM(郭东明)
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/11
Copper pillars modified silicon microgrooves changed the working style of micro heat pipe 会议论文
5th International Conference of the Chinese Society of Micro Nano Technology
作者:  Luo Y(罗怡);  Wang XD(王晓东);  Dan Q(单庆)
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/11
Experimental investigation of thermal conduction performance on silicon-based micro flat heat pipe 会议论文
5th International Conference of the Chinese Society of Micro Nano Technology
作者:  Luo Y(罗怡);  Wang XD(王晓东)
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/11
Effects of beam patterns on removal of phosphorous in silicon by electron beam melting 会议论文
11th International Conference on Electron Beam Technologies
作者:  Tan Y(谭毅);  Jiang DC(姜大川);  Dong W(董伟)
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/11
Design and fabrication of silicon-copper micro heat pipe 会议论文
The 18th International Conference on Mechatronics Technology
作者:  Luo Y(罗怡);  Wang XD(王晓东)
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/11
Research on elastic-plastic transition and hardening effect on monocrystalline silicon surfaces 会议论文
Advanced Materials Research
作者:  Guo XG(郭晓光);  Jin ZJ(金洙吉);  Kang RK(康仁科)
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/11
Research on elastic-plastic transition and hardening effect for monocrystalline silicon surfaces 会议论文
10th CHINA-JAPAN International Conference on Ultra-Precision Machining Process, 10th CJUMP and 2014 International Conference on Surface Finishing Technology, ICSFT 2014, 2014-10-17
作者:  Guo X.G.;  Zhai C.H.;  Liu Z.Y.;  Zhang L.;  Jin Z.J.
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/11


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