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Analysis of the ohmic contacts of Ti/Al/Ni/Au to AlGaN/GaN HEMTs by the multi-step annealing process 期刊论文
journal of semiconductors, 2012, 卷号: 33, 期号: 6, 页码: 064005
Yan, Wei; Zhang, Renping; Du, Yandong; Han, Weihua; Yang, Fuhua
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