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Method of etching for multi-layered structure of semiconductors in groups III-V and method for manufacturing vertical cavity surface emitting laser device 专利
专利号: US20070134926A1, 申请日期: 2007-06-14, 公开日期: 2007-06-14
作者:  KWON, O. KYUN;  PARK, MI RAN;  HAN, WON SEOK;  SONG, HYUN WOO
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