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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4000-4005
李春; 李晓春; 阎鹏勋; 崇二敏; 刘洋; 岳光辉; 范晓彦
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