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IR studies of reactive DC magnetron sputtered SiC films on silicon using effective medium theory 期刊论文
MATERIALS LETTERS, 2000, 卷号: 43, 期号: 4, 页码: 215-219
Lei,YM; Yu,YH; Cheng,LL; Ren,CX; Zou,SC; Wong,SP; Chen,DH; Wilson,IH
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