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光电子学 38 半导体材料 25 信息与系统科学相关工程与技术 14
半导体器件 14 Physics 11 光学工程 11
半导体物理 10 微电子学 9 Materials Science 7
材料科学与物理化学 7 Science & Technology - Other Topics 5 物理化学 5
Physics, Applied 4 Physics, Multidisciplinary 4 Polymer Science 4
光存储 4 半导体化学 4 Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied 3
Optics 3 Science & Technology - Other Topics; Materials Science; Physics 3 physics 3
光学材料;晶体 3 Alignment - Lithography - Rapid thermal annealing 2 Chemistry, Multidisciplinary 2
Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter 2 Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied 2 Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics 2
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Optics 2 Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied 2 Engineering; Science & Technology - Other Topics; Materials Science; Physics 2
Metallurgy & Metallurgical Engineering 2 chemistry; science & technology - other topics; materials science; physics 2 engineering; optics; physics 2
engineering; science & technology - other topics; physics 2 science & technology - other topics; materials science; physics 2 光学 2
光学薄膜 2 光电子技术 2 力学 2
微细加工技术 2 数理科学和化学 2 ADAPTIVE OPTICS; LOW-COST; LITHOGRAPHY; PERFORMANCE; UNIMORPH; MODES 1
APPROXIMATE BOUNDARY-CONDITIONS; BROAD-BAND; DIFFRACTION LIMIT; INTERFERENCE NANOLITHOGRAPHY; POLARIZATION CONVERSION; TERAHERTZ METAMATERIAL; PHASE DISCONTINUITIES; NEGATIVE REFRACTION; PERFECT ABSORPTION; OPTICAL HYPERLENS 1 ARM processors - Complex networks - Computer control - Control systems - Design - Embedded systems - Human computer interaction - Intelligent control - Liquid crystal displays - Lithography - Manufacture - Optical devices - Program debugging - Remote control - Touch screens 1 Aberrations - Computer simulation - Image quality - Optical instrument lenses - Optical systems - Patents and inventions - Photolithography - Refractive index - Wavefronts 1
Aberrations - Diffraction - Diffraction gratings - Interferometers - Semiconductor device manufacture - Shearing - Two dimensional - Units of measurement 1 Aberrations - Interferometers - Optical data processing - Optical testing - Optical variables measurement - Phase shift - Polarization - Semiconductor device manufacture - Shearing - Units of measurement - Wavefronts 1 Algorithms - Image quality - Manufacture - Optical testing - Simulated annealing 1
Algorithms - Interpolation - Redundancy - Silicon wafers - Surface reconstruction 1 Alignment 1 Alignment - Aspherics - Computer generated holography - Fabrication - Holograms - Instruments - Interferometry - Lithography - Surface roughness - Wavefronts 1
Alignment - Control equipment - Lithography - Manufacture - Optical systems - Wavefronts 1 Alignment - Demodulation - Frequency domain analysis - Information filtering - Optical variables measurement 1 Alignment - Lithography - Nanoimprint lithography - Photolithography 1
Analog to digital conversion - Data acquisition - Signal detection 1 Applied 1 Aspect ratio - Diffraction - Finite difference time domain method 1
Aspherics - Electron holography - Holograms - Lithography - Manufacture - Optical testing 1 Aspherics - Holograms - Interpolation - Lithography - Optical data processing - Optical design - Optical testing - Optical variables measurement 1 Atomic force microscopy - Finishing - Light - Light scattering - Lithography - Optical testing - Silicon - Substrates - Surface defects - Surface properties - Surface roughness 1
Automation - Lithography 1 Bar codes - Design - Integrated circuit manufacture - Microelectronics - Optical devices 1 Biochemical Research Methods; Chemistry, Multidisciplinary; Nanoscience & Nanotechnology 1
Casting - Curing - Diffraction gratings - Fabrication - Manufacture - Molds - Nanostructures - Optical devices - Organic polymers - Silicones 1 Chemistry 1 Chemistry, Applied 1
Chemistry, Physical 1 Chemistry, Physical; Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering 1 Chemistry; Materials Science 1
Chemistry; Materials Science; Physics 1 Chemistry; Science & Technology - Other Topics; Materials Science 1 Chemistry; Science & Technology - Other Topics; Materials Science; Physics 1
Collimation; moire fringe; lithography alignment 1 Computer simulation - Leveling (machinery) - Nanolithography 1 Cost effectiveness - Costs - Dielectric films - Electron emission - Laser excitation - Lithography - Metamaterials - Nanotechnology - Phonons - Plasmons - Quantum theory 1
Cost effectiveness - Curing - Fabrication - Lithography - Microchannels - Molds - Photopolymerization - Pulse width modulation 1 Demodulation - Image processing - Rapid thermal annealing 1 Dielectric films - Electric field measurement - Electric fields - Image quality - Imaging techniques 1
Diffraction - Light polarization - Lithography - Microanalysis - Microfabrication - Periodic structures 1 Diffraction gratings - Electrical engineering - Magnetic materials 1 Diffraction gratings - Near field scanning optical microscopy - Photoresists 1
EVANESCENT NEAR-FIELD; OPTICAL LITHOGRAPHY; SILVER SUPERLENS; VISIBLE-LIGHT; REFRACTION; SURFACE; POLARITONS 1 Electric fields 1 Electric fields - Natural frequencies - Near field scanning optical microscopy 1
Electrical engineering - Magnetic materials 1 Electrochemistry; Materials Science, Coatings & Films 1 Energy & Fuels 1
Energy & Fuels; Materials Science; Physics 1 Engineering - Molecular physics 1 Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied 1
Engineering, Electrical & Electronic; Materials Science, Multidisciplinary 1 Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter 1 Engineering, Electrical & Electronic; Nanoscience & Nanotechnology 1
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied 1 Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied 1 Engineering; Materials Science; Physics 1
Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics 1 Fabrication - Fiber lasers - Fluorescence - Nanotechnology - Optical properties - Raman scattering - Reflection - Silicon - Solar energy 1 Focusing; Microlens array; Lithography 1
High numeric aperture; large view field; aspheric surface; dual-telecentric structure 1

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