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共162条,第1-100条
光电子学
38
半导体材料
25
信息与系统科学相关工程与技术
14
半导体器件
14
Physics
11
光学工程
11
半导体物理
10
微电子学
9
Materials Science
7
材料科学与物理化学
7
Science & Technology - Other Topics
5
物理化学
5
Physics, Applied
4
Physics, Multidisciplinary
4
Polymer Science
4
光存储
4
半导体化学
4
Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied
3
Optics
3
Science & Technology - Other Topics; Materials Science; Physics
3
physics
3
光学材料;晶体
3
Alignment - Lithography - Rapid thermal annealing
2
Chemistry, Multidisciplinary
2
Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter
2
Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied
2
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
2
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Optics
2
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
2
Engineering; Science & Technology - Other Topics; Materials Science; Physics
2
Metallurgy & Metallurgical Engineering
2
chemistry; science & technology - other topics; materials science; physics
2
engineering; optics; physics
2
engineering; science & technology - other topics; physics
2
science & technology - other topics; materials science; physics
2
光学
2
光学薄膜
2
光电子技术
2
力学
2
微细加工技术
2
数理科学和化学
2
ADAPTIVE OPTICS; LOW-COST; LITHOGRAPHY; PERFORMANCE; UNIMORPH; MODES
1
APPROXIMATE BOUNDARY-CONDITIONS; BROAD-BAND; DIFFRACTION LIMIT; INTERFERENCE NANOLITHOGRAPHY; POLARIZATION CONVERSION; TERAHERTZ METAMATERIAL; PHASE DISCONTINUITIES; NEGATIVE REFRACTION; PERFECT ABSORPTION; OPTICAL HYPERLENS
1
ARM processors - Complex networks - Computer control - Control systems - Design - Embedded systems - Human computer interaction - Intelligent control - Liquid crystal displays - Lithography - Manufacture - Optical devices - Program debugging - Remote control - Touch screens
1
Aberrations - Computer simulation - Image quality - Optical instrument lenses - Optical systems - Patents and inventions - Photolithography - Refractive index - Wavefronts
1
Aberrations - Diffraction - Diffraction gratings - Interferometers - Semiconductor device manufacture - Shearing - Two dimensional - Units of measurement
1
Aberrations - Interferometers - Optical data processing - Optical testing - Optical variables measurement - Phase shift - Polarization - Semiconductor device manufacture - Shearing - Units of measurement - Wavefronts
1
Algorithms - Image quality - Manufacture - Optical testing - Simulated annealing
1
Algorithms - Interpolation - Redundancy - Silicon wafers - Surface reconstruction
1
Alignment
1
Alignment - Aspherics - Computer generated holography - Fabrication - Holograms - Instruments - Interferometry - Lithography - Surface roughness - Wavefronts
1
Alignment - Control equipment - Lithography - Manufacture - Optical systems - Wavefronts
1
Alignment - Demodulation - Frequency domain analysis - Information filtering - Optical variables measurement
1
Alignment - Lithography - Nanoimprint lithography - Photolithography
1
Analog to digital conversion - Data acquisition - Signal detection
1
Applied
1
Aspect ratio - Diffraction - Finite difference time domain method
1
Aspherics - Electron holography - Holograms - Lithography - Manufacture - Optical testing
1
Aspherics - Holograms - Interpolation - Lithography - Optical data processing - Optical design - Optical testing - Optical variables measurement
1
Atomic force microscopy - Finishing - Light - Light scattering - Lithography - Optical testing - Silicon - Substrates - Surface defects - Surface properties - Surface roughness
1
Automation - Lithography
1
Bar codes - Design - Integrated circuit manufacture - Microelectronics - Optical devices
1
Biochemical Research Methods; Chemistry, Multidisciplinary; Nanoscience & Nanotechnology
1
Casting - Curing - Diffraction gratings - Fabrication - Manufacture - Molds - Nanostructures - Optical devices - Organic polymers - Silicones
1
Chemistry
1
Chemistry, Applied
1
Chemistry, Physical
1
Chemistry, Physical; Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering
1
Chemistry; Materials Science
1
Chemistry; Materials Science; Physics
1
Chemistry; Science & Technology - Other Topics; Materials Science
1
Chemistry; Science & Technology - Other Topics; Materials Science; Physics
1
Collimation; moire fringe; lithography alignment
1
Computer simulation - Leveling (machinery) - Nanolithography
1
Cost effectiveness - Costs - Dielectric films - Electron emission - Laser excitation - Lithography - Metamaterials - Nanotechnology - Phonons - Plasmons - Quantum theory
1
Cost effectiveness - Curing - Fabrication - Lithography - Microchannels - Molds - Photopolymerization - Pulse width modulation
1
Demodulation - Image processing - Rapid thermal annealing
1
Dielectric films - Electric field measurement - Electric fields - Image quality - Imaging techniques
1
Diffraction - Light polarization - Lithography - Microanalysis - Microfabrication - Periodic structures
1
Diffraction gratings - Electrical engineering - Magnetic materials
1
Diffraction gratings - Near field scanning optical microscopy - Photoresists
1
EVANESCENT NEAR-FIELD; OPTICAL LITHOGRAPHY; SILVER SUPERLENS; VISIBLE-LIGHT; REFRACTION; SURFACE; POLARITONS
1
Electric fields
1
Electric fields - Natural frequencies - Near field scanning optical microscopy
1
Electrical engineering - Magnetic materials
1
Electrochemistry; Materials Science, Coatings & Films
1
Energy & Fuels
1
Energy & Fuels; Materials Science; Physics
1
Engineering - Molecular physics
1
Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied
1
Engineering, Electrical & Electronic; Materials Science, Multidisciplinary
1
Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
1
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology
1
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied
1
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Optics; Physics, Applied
1
Engineering; Materials Science; Physics
1
Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics
1
Fabrication - Fiber lasers - Fluorescence - Nanotechnology - Optical properties - Raman scattering - Reflection - Silicon - Solar energy
1
Focusing; Microlens array; Lithography
1
High numeric aperture; large view field; aspheric surface; dual-telecentric structure
1
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