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力学 5 半导体物理 4 Physics 2
Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining 1 Chemistry, Physical; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary 1 Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics 1
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光学材料;光学玻璃 1 光学薄膜 1 光电子学 1
半导体材料 1 工程力学 1 材料科学与物理化学 1
环境科学::环境化学 1

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