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	Design and fabrication of a pyramid wavefront sensor
	Wang, Aina; Yao, Jun; Cai, Dongmei; Ren, Hao
刊名	OPTICAL ENGINEERING
	2010-07-10
卷号	49期号:7
关键词	pyramid wavefront sensor reflective pyramidal mirror mask moving lithography
英文摘要	A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3461956]
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	X-RAY-LITHOGRAPHY ; ADAPTIVE OPTICS ; MICROLENS ARRAY ; LIGA PROCESS
收录类别	SCI
语种	英语
WOS记录号	WOS:000280522800009
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3398]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
推荐引用方式 GB/T 7714	Wang, Aina,Yao, Jun,Cai, Dongmei,et al. Design and fabrication of a pyramid wavefront sensor[J]. OPTICAL ENGINEERING,2010,49(7).
APA	Wang, Aina,Yao, Jun,Cai, Dongmei,&Ren, Hao.(2010).Design and fabrication of a pyramid wavefront sensor.OPTICAL ENGINEERING,49(7).
MLA	Wang, Aina,et al."Design and fabrication of a pyramid wavefront sensor".OPTICAL ENGINEERING 49.7(2010).

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