Surface accuracy analysis of active stressed lap based on structure function

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	Surface accuracy analysis of active stressed lap based on structure function
	Zhao, Hongshen 1,2; Fan, Bin 1; Li, Xiaojin 1; Zeng, Zhige 1
刊名	OPTICAL REVIEW
	2015-02-01
卷号	22 期号:1 页码:52-57
关键词	Structure function Active stressed lap Big mirror processing Surface representation
英文摘要	In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	MIRROR
收录类别	SCI
语种	英语
WOS记录号	WOS:000353630200008
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/2556]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57.
APA	Zhao, Hongshen,Fan, Bin,Li, Xiaojin,&Zeng, Zhige.(2015).Surface accuracy analysis of active stressed lap based on structure function.OPTICAL REVIEW,22(1),52-57.
MLA	Zhao, Hongshen,et al."Surface accuracy analysis of active stressed lap based on structure function".OPTICAL REVIEW 22.1(2015):52-57.