Ab initio and kinetic calculations for the reactions of Cl with SiHnCl4-n (n=1,2,3,4) | |
Pei, K; Li, HY | |
刊名 | journal of chemical physics
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2004-10-08 | |
卷号 | 121期号:14页码:6738-6742 |
英文摘要 | the direct hydrogen abstraction reactions of cl atom with sihncl4-n (n=1,2,3,4) have been studied systematically using ab initio molecular orbital theory. geometries have been optimized at the mp2 level with 6-311+g(d) basis set, qcisd(t)/6-311+g(d,p) has been used in the final single point energy calculation. the kinetic calculations of these reactions have been explored using the canonical variational transition (cvt) state theory method with small-curvature tunneling (sct) effect correction over the temperature range of 200-2000 k. the cvt/sct rate constants exhibit typical non-arrhenius behavior and three-parameter rate-temperature formulas have been fitted for the reactions of cl with sih4, sih3cl, sih2cl2, and sihcl3, respectively (in unit of cm3 molecule-1 s-1). the calculated cvt/sct rate constants are in agreement with the available experimental values. (c) 2004 american institute of physics. |
WOS标题词 | science & technology ; physical sciences |
类目[WOS] | physics, atomic, molecular & chemical |
研究领域[WOS] | physics |
关键词[WOS] | transition-state theory ; hydrogen abstraction reaction ; rate constants ; atomic chlorine ; direct dynamics ; reaction-rates ; reaction-path ; silane ; sih4 ; deposition |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000224269200018 |
公开日期 | 2015-11-10 |
内容类型 | 期刊论文 |
源URL | [http://159.226.238.44/handle/321008/138423] ![]() |
专题 | 大连化学物理研究所_中国科学院大连化学物理研究所 |
作者单位 | 1.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Lab Environm Spect, Hefei 230031, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100864, Peoples R China 3.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China |
推荐引用方式 GB/T 7714 | Pei, K,Li, HY. Ab initio and kinetic calculations for the reactions of Cl with SiHnCl4-n (n=1,2,3,4)[J]. journal of chemical physics,2004,121(14):6738-6742. |
APA | Pei, K,&Li, HY.(2004).Ab initio and kinetic calculations for the reactions of Cl with SiHnCl4-n (n=1,2,3,4).journal of chemical physics,121(14),6738-6742. |
MLA | Pei, K,et al."Ab initio and kinetic calculations for the reactions of Cl with SiHnCl4-n (n=1,2,3,4)".journal of chemical physics 121.14(2004):6738-6742. |
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