Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy
	Shi JL(施佳林); Liu LQ(刘连庆); Zhou PL(周培林); Wang FF(王飞飞); Wang YC(王越超)
刊名	IEEE TRANSACTIONS ON NANOTECHNOLOGY
	2015
卷号	14 期号:4 页码:735-741
关键词	Atomic force microscopy (AFM) dynamic cantilever model subnanomachining ultrasonic-assisted machining
ISSN号	1536-125X
通讯作者	施佳林
产权排序	1
中文摘要	The ultrasonic vibration (UV)-assisted method, as an innovative nanomachining process, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the mechanism of nanomachining by ultrasonic-assisted AFM is still unclear. Furthermore, the mathematical control model for the nanomachining process is still lacking. Therefore, the UV-assisted nanomachining process is difficult to control on the nanometer-thick film, and no additional work has been reported at this time. In this paper, the mechanisms of ultrasonic-assisted AFM subnanomachining have been analyzed by using a point-mass model for the dynamic AFM cantilever, and a mathematical model of ultrasonic subnanomachining has been established on the basis of these mechanisms. The subnanomachining experiments were carried out on a 5-nm-thick polystyrene thin film using AFM under sample UV conditions. The experimental results have shown that the amplitude of sample UV can regulate the subnanomachining depth. Finally, the simulation results from the mathematical model and the experimental results have been compared in this study.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
关键词[WOS]	THIN-FILMS ; NANOFABRICATION ; SURFACE ; NANOSCALE ; SCALE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; CANTILEVERS ; CHALLENGES ; TIP
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000357821500022
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/16854]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Shi JL,Liu LQ,Zhou PL,et al. Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2015,14(4):735-741.
APA	Shi JL,Liu LQ,Zhou PL,Wang FF,&Wang YC.(2015).Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy.IEEE TRANSACTIONS ON NANOTECHNOLOGY,14(4),735-741.
MLA	Shi JL,et al."Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy".IEEE TRANSACTIONS ON NANOTECHNOLOGY 14.4(2015):735-741.