Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension
	Yang LS ; Liu L ; Wang GY ; Xu ZZ(徐至展)
刊名	opt. eng.
	2001
卷号	40 期号:6 页码:909
关键词	PZT actuator inverse piezoelectric extension measurement differential confocal microscopy
ISSN号	0091-3286
中文摘要	a noncontacting and noninterferometric depth discrimination technique, which is based on differential confocal microscopy, was used to measure the inverse piezoelectric extension of a piezoelectric ceramic lead zirconate titanate actuator. the response characteristics of the actuator with respect to the applied voltage, including displacement, linearity, and hysteresis, were obtained with nanometer measurement accuracy. errors of the measurement have been analyzed. (c) 2001 society of photo-optical instrumentation engineers.
语种	英语
WOS记录号	WOS:000169701600005
公开日期	2009-09-18
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/132]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
推荐引用方式 GB/T 7714	Yang LS,Liu L,Wang GY,et al. Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension[J]. opt. eng.,2001,40(6):909, 913.
APA	Yang LS,Liu L,Wang GY,&徐至展.(2001).Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension.opt. eng.,40(6),909.
MLA	Yang LS,et al."Noninterferometric measurement of lead zirconate titanate inverse piezoelectric extension".opt. eng. 40.6(2001):909.