Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films

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	Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films
	D. L. ; Lei Qi, H. ; Wang, T. G. ; Pei, Z. L. ; Gong, J. ; Sun, C.
刊名	Journal of Materials Science & Technology
	2015
卷号	31 期号:1 页码:55-64
关键词	Cr-Mo-N films DC magnetron sputtering Hardness Critical load Friction coefficient Wear nitride thin-films substrate bias nitrogen flow coatings hardness temperature pvd modulus ratio dc
ISSN号	1005-0302
原文出处	://WOS:000347904300009
公开日期	2015-05-08
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/73897]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	D. L.,Lei Qi, H.,Wang, T. G.,et al. Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films[J]. Journal of Materials Science & Technology,2015,31(1):55-64.
APA	D. L.,Lei Qi, H.,Wang, T. G.,Pei, Z. L.,Gong, J.,&Sun, C..(2015).Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films.Journal of Materials Science & Technology,31(1),55-64.
MLA	D. L.,et al."Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films".Journal of Materials Science & Technology 31.1(2015):55-64.