Research and development of a multiple data source curve drawing software for IC equipment

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 工业控制网络与系统研究室

	Research and development of a multiple data source curve drawing software for IC equipment
	Jin N(金妮); Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴); Wang CX(王晨曦)
	2014
会议名称	2014 International Conference on Manufacturing and Engineering Technology (ICMET)
会议日期	October 17-19, 2014
会议地点	Sanya, China
关键词	IC equipment control system C# language
页码	209-212
中文摘要	It is essential that IC equipment control software can get more intuitive information from the production data during wafer manufacturing. Currently, data are provided to users in a report form in most IC control systems that are not intuitive and cannot reflect the data trend of a long-term change. However, only a few IC equipment control systems can provide curve display function, which is still incomplete and inflexibility, and it is difficult to implement flexible configuration according to the user requirements. Therefore, C# control technology and XML approaches were studied, a flexible and multiple data source curve drawing software for IC equipment are introduced in this paper. This software supports multiple data source data source data acquisition and conversion, it can set curve parameters dynamically. In addition, it is easy to share the resource, operate, maintain and upgrade the software.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议录	Manufacturing and Engineering Technology
会议录出版者	Taylor & Francis Group
会议录出版地	London
语种	英语
ISBN号	978-1-138-02645-2
WOS记录号	WOS:000380507800043
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/15360]
专题	沈阳自动化研究所_工业控制网络与系统研究室
推荐引用方式 GB/T 7714	Jin N,Xu AD,Liu MZ,et al. Research and development of a multiple data source curve drawing software for IC equipment[C]. 见:2014 International Conference on Manufacturing and Engineering Technology (ICMET). Sanya, China. October 17-19, 2014.