Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films

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	Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films
	Wang FF(王飞飞); Yu HB(于海波); Liang WF(梁文峰); Liu LQ(刘连庆); Mai, John D.; Lee, Gwo-Bin; Li WJ(李文荣)
刊名	MICROFLUIDICS AND NANOFLUIDICS
	2014
卷号	16 期号:6 页码:1097-1106
关键词	Electrohydrodynamic instability Optically induced electrokinetics Thin-film patterning Micro-pillars
ISSN号	1613-4982
通讯作者	李文荣
产权排序	1
中文摘要	Projected light patterns are used to induce electrohydrodynamic instabilities in a polymer thin film sandwiched between two electrodes. Using this optically induced electrohydrodynamic instability (OEHI) phenomenon, we have successfully demonstrated rapid, microscale patterning of polydimethylsiloxane (PDMS) pillar arrays on a thin-film hydrogenated amorphous silicon layer on top of an indium titanium oxide glass substrate. This glass substrate is the bottom electrode in a two-electrode, parallel-plate capacitor configuration with a micron-scale gap. Within this gap are a thin film of spin-coated PDMS and a thin layer of air. Primary pillar growth is first observed within 5-90 s in the dark regions of the projected patterns and pillar growth eventually spreads to the illuminated regions when the initial PDMS thickness is <2 mu m. Experimental data characterizing the change in pillar diameters (between 15 and 30 mu m in diameter) show that they can be decoupled from the inter-pillar spacing (maintaining a constant similar to 84 mu m pitch between pillar centers) by controlling the applied DC voltage (between 110 and 210 V). Experimental results also show the importance of the optically induced lateral electric field on controlling pillar formation. This OEHI method of rapid pillar generation, with voltage control of the pillar diameter and control of pillar position via projected light patterns, presents new opportunities for low cost, efficient, and simple fabrication of micro, and perhaps nanoscale, polymer structures that could be used in many bioMEMS applications.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas
研究领域[WOS]	Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
关键词[WOS]	FIELD-INDUCED INSTABILITIES ; ELECTRIC-FIELD ; POLYMER-FILMS ; PILLAR ARRAYS ; LIQUID-FILMS ; LITHOGRAPHY ; LIMITATIONS ; INTERFACE
收录类别	SCI ; EI ; CPCI（ISTP）
语种	英语
WOS记录号	WOS:000338835000011
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/15123]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Wang FF,Yu HB,Liang WF,et al. Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films[J]. MICROFLUIDICS AND NANOFLUIDICS,2014,16(6):1097-1106.
APA	Wang FF.,Yu HB.,Liang WF.,Liu LQ.,Mai, John D..,...&Li WJ.(2014).Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films.MICROFLUIDICS AND NANOFLUIDICS,16(6),1097-1106.
MLA	Wang FF,et al."Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films".MICROFLUIDICS AND NANOFLUIDICS 16.6(2014):1097-1106.