Extracting of removal function in CCOS based on edge detection algorithm

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	Extracting of removal function in CCOS based on edge detection algorithm
	Liu J. ; Wang S. Z. ; Zhang L. H. ; Chen H. N.
	2013
会议日期	2013
会议地点	Conference Location
英文摘要	In order to realize removal function model building with high precision in computer controlled optical polishing process, a kind of new algorithm is proposed in this paper, which was based on edge detection technology. The algorithm preprocesses the interferometric metrology result and inverts it into digital image data at first. And then the Canny edge detecting operator and Hough transform are used to detect and extract the image edge. At last the boundary of the removal function was acquired. The center of removal function boundary was allocated quickly in this algorithm, which was assisted with the particularly center position. It reduced a lot of blind calculation for the target center of circle accumulating counts. At last, the experiment result indicated the algorithm in this paper could be used in removal function modeling and dwell time optimization solving.
收录类别	CPCI-S
会议录	Proceedings of SPIE
ISSN号	0277-786X978-0-8194-9779-6
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/41129]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Liu J.,Wang S. Z.,Zhang L. H.,et al. Extracting of removal function in CCOS based on edge detection algorithm[C]. 见:. Conference Location. 2013.