Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization

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	Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization
	Li, WX ; Gu, CZ ; Cui, AJ ; Fenton, JC ; Jiang, QQ ; Warburton, PA ; Shen, THH
刊名	JOURNAL OF MATERIALS RESEARCH
	2013
卷号	28 期号:22 页码:3063
ISSN号	0884-2914
通讯作者	Li, Wuxia (reprint author), Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Lab Microfabricat, Inst Phys, Beijing 100190, Peoples R China
中文摘要	Three-dimensional (3D) nanostructures and nanodevices have attracted tremendous interest in the past few years due to their special mechanical and physical properties. Nanodevices using 3D nanostructures as the building blocks have been demonstrated to exhibit multifunctionality and functions that conventional planar devices cannot achieve. In this article, we report and review focused ion beam techniques for direct site-specific growth of 3D nanostructures and postgrowth shape modification of freestanding nanostructures by ion beam-induced chemical vapor deposition and ion-beam-irradiation-induced plastic bending, respectively. Such techniques have shown nanometer-scale resolution and accuracy in the fabrication of metallic nanoelectrodes, 3D pickup coils, nanogaps, and multibranched structures. Characterization of the resulting nanostructures shows that focused ion beam techniques allow conducting and superconducting freestanding 3D structures to be tailored in size, geometry, and integrated with planar electronic, mechanical, and superconducting nanodevices, potentially enabling lab-on-a-chip experiments.
语种	英语
公开日期	2014-01-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/57601]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Li, WX,Gu, CZ,Cui, AJ,et al. Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization[J]. JOURNAL OF MATERIALS RESEARCH,2013,28(22):3063.
APA	Li, WX.,Gu, CZ.,Cui, AJ.,Fenton, JC.,Jiang, QQ.,...&Shen, THH.(2013).Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization.JOURNAL OF MATERIALS RESEARCH,28(22),3063.
MLA	Li, WX,et al."Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization".JOURNAL OF MATERIALS RESEARCH 28.22(2013):3063.