A trilayer process for the fabrication of Al phase qubits

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	A trilayer process for the fabrication of Al phase qubits
	Xue, GM ; Yu, HF ; Tian, Y ; Deng, H ; Liu, WY ; Ren, YF ; Yu, HW ; Zheng, DN ; Zhao, SP
刊名	SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
	2013
卷号	56 期号:12 页码:2377
关键词	Josephson junction trilayer process superconducting qubit
ISSN号	1674-7348
通讯作者	Zhao, SP (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要	Herein we develop an Al/AlOx/Al trilayer process, feasible to fabricate complex circuits with wiring crossovers, for the preparation of Al junctions and phase qubits. The AlOx layer is obtained by in situ thermal oxidation, which provides high-quality junction tunnel barriers. The Al junctions show a considerably low leakage current and the Josephson critical current density can be conveniently controlled in the range of a few to above 100 A/cm(2), which is favorable in the phase qubit application. Macroscopic quantum tunneling, energy spectrum, energy relaxation time, Rabi oscillation, and Ramsey interference of the Al phase qubits are measured, demonstrating clearly quantum coherent dynamics with a timescale of 10 ns. Further improvements of the coherent dynamic properties of the device are discussed.
资助信息	National Natural Science Foundation of China [11104340, 11104332]; Ministry of Science and Technology of China [2009CB929102, 2011CBA00106]
语种	英语
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/56751]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Xue, GM,Yu, HF,Tian, Y,et al. A trilayer process for the fabrication of Al phase qubits[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2013,56(12):2377.
APA	Xue, GM.,Yu, HF.,Tian, Y.,Deng, H.,Liu, WY.,...&Zhao, SP.(2013).A trilayer process for the fabrication of Al phase qubits.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,56(12),2377.
MLA	Xue, GM,et al."A trilayer process for the fabrication of Al phase qubits".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 56.12(2013):2377.