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Structural and electrical properties of epitaxial Ba0.5Sr0.5TiO3/ SrRuO3 heterostructures grown by pulsed laser deposition
Zhu, XH ; Zheng, DN ; Peng, W ; Miao, J ; Li, J
刊名JOURNAL OF CRYSTAL GROWTH
2004
卷号268期号:1-2页码:192
关键词(BA0.5SR0.5)TIO3 THIN-FILMS FERROELECTRIC HETEROSTRUCTURES ELECTRODES FABRICATION DEPENDENCE LAALO3
ISSN号0022-0248
通讯作者Zhu, XH (reprint author), Chinese Acad Sci, Inst Phys & Ctr Condensed Matter Phys, Natl Lab Superconduct, POB 603, Beijing 100080, Peoples R China.
中文摘要High quality Ba0.5Sr0.5TiO3/SrRuO3 (BST/SRO) heterostructure films have been successfully fabricated by pulsed-laser deposition on (0 0 1) LaAlO3 (LAO) substrates. The bilayer films were both (0 0 1) oriented normal to the substrate surface confirmed by X-ray diffraction analysis. The SRO layer with atomically smooth surface and good metallic behavior serves as not only an ideal bottom electrode but also an excellent template for epitaxial growth of the BST thin film. A parallel-plate capacitor configuration was used to measure the capacitance-voltage and leakage current characteristics of the BST films. The dielectric constant and maximum loss tangent measured at 1 MHz and 300 K were 1058 and 0.0092, respectively. The FOM-factor value reached 49 under the condition of +/-6 V DC bias and 1 MHz. A leakage current density of less than 6 x 10(-7) A/cm(2) was obtained at an electric field intensity of 2 x 10(5) V/cm. These results show the. potential of the BST/SRO heterostructures for microelectronic device applications. (C) 2004 Elsevier B.V. All rights reserved.
收录类别SCI
语种英语
公开日期2013-09-24
内容类型期刊论文
源URL[http://ir.iphy.ac.cn/handle/311004/53197]  
专题物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式
GB/T 7714
Zhu, XH,Zheng, DN,Peng, W,et al. Structural and electrical properties of epitaxial Ba0.5Sr0.5TiO3/ SrRuO3 heterostructures grown by pulsed laser deposition[J]. JOURNAL OF CRYSTAL GROWTH,2004,268(1-2):192.
APA Zhu, XH,Zheng, DN,Peng, W,Miao, J,&Li, J.(2004).Structural and electrical properties of epitaxial Ba0.5Sr0.5TiO3/ SrRuO3 heterostructures grown by pulsed laser deposition.JOURNAL OF CRYSTAL GROWTH,268(1-2),192.
MLA Zhu, XH,et al."Structural and electrical properties of epitaxial Ba0.5Sr0.5TiO3/ SrRuO3 heterostructures grown by pulsed laser deposition".JOURNAL OF CRYSTAL GROWTH 268.1-2(2004):192.
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