Multiphoton interaction of a two-level atom with a large period quantized standing wave field beyond the Raman-Nath regime | |
Wang, XG ; Yu, RJ | |
刊名 | ACTA PHYSICA SINICA-OVERSEAS EDITION
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1999 | |
卷号 | 8期号:2页码:89 |
关键词 | JAYNES-CUMMINGS MODEL QUANTUM STATE RESONANCE FLUORESCENCE PHOTON STATISTICS COHERENT STATES DEFLECTION BEAM LIGHT |
ISSN号 | 1004-423X |
通讯作者 | Wang, XG: Chinese Acad Sci, Inst Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
中文摘要 | Langmuir probes and Faraday cups have been used to characterize electron cyclotron resonance plasmas which have been used in the depositions of GaN films on the substrate of (0001) alpha-Al2O3. These plasmas were generated with microwave power (P-w) from 300 W to 1100 W at pressures (p) range from 0.8 Pa to 0.05 Pa using N-2 as the plasma source. The relationship between the plasma parameter, such as ion density(N-i), electron temperature(T-e), plasma potential(V-p) and ion current density(J(i)), and system parameters, such as p(W) and p, is given. And the axial and radial distributions of T-e, N-i, V-p and J(i) are presented. The growth rate and the quality of the GaN film strongly depend on the growth condition. The higher the plasma density, the higher the N/Ga ratio of GaN film. When the microwave power was 850 W and gas pressure was 0.22 Pa, the plasma near the substrate was characterized by a T-e near 1.4 eV and plasma density near 2.0 x 10(11) cm(-3), and the growth-rate of GaN was as high as 0.9 mu m/h. The full width at half maximum of double-crystal X-ray diffraction rocking curve is 16 arcmin. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-18 |
内容类型 | 期刊论文 |
源URL | [http://ir.iphy.ac.cn/handle/311004/42398] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Wang, XG,Yu, RJ. Multiphoton interaction of a two-level atom with a large period quantized standing wave field beyond the Raman-Nath regime[J]. ACTA PHYSICA SINICA-OVERSEAS EDITION,1999,8(2):89. |
APA | Wang, XG,&Yu, RJ.(1999).Multiphoton interaction of a two-level atom with a large period quantized standing wave field beyond the Raman-Nath regime.ACTA PHYSICA SINICA-OVERSEAS EDITION,8(2),89. |
MLA | Wang, XG,et al."Multiphoton interaction of a two-level atom with a large period quantized standing wave field beyond the Raman-Nath regime".ACTA PHYSICA SINICA-OVERSEAS EDITION 8.2(1999):89. |
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