Hard and wear-resistant titanium nitride films for ceramic cutting tools by pulsed high energy density plasma

CORC > 物理研究所 > 物理所公开发表论文 > 期刊论文

	Hard and wear-resistant titanium nitride films for ceramic cutting tools by pulsed high energy density plasma
	Peng, ZJ ; Miao, HZ ; Wang, W ; Yang, S ; Liu, C ; Qi, LH
刊名	SURFACE & COATINGS TECHNOLOGY
	2003
卷号	166 期号:2-3 页码:183
关键词	DEPOSITION COATINGS FIELD
ISSN号	0257-8972
通讯作者	Peng, ZJ: Tsing Hua Univ, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China.
中文摘要	High-quality and wear-resistant titanium nitride films were deposited onto silicon nitride ceramic cutting tools by pulsed high energy density plasma technique at ambient temperature. The adhesive strength of TiN film to the ceramic substrate has been satisfactory with very high critical load up to more than 80 mN measured by nanoscratch tester. The TiN films possess very high values of nanohardness and Young's modulus, which are near to 28 and 350 GPa, respectively. The wear resistance and edge life of the ceramic tools were increased greatly because of the deposition of titanium nitride coatings. The cutting performance of the silicon nitride ceramic tools with such TiN films could be optimized by varying the deposition conditions, including the (shot) number of pulsed plasma and the discharge voltage between the inner and outer electrodes, etc. (C) 2002 Elsevier Science B.V. All rights reserved.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/39083]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Peng, ZJ,Miao, HZ,Wang, W,et al. Hard and wear-resistant titanium nitride films for ceramic cutting tools by pulsed high energy density plasma[J]. SURFACE & COATINGS TECHNOLOGY,2003,166(2-3):183.
APA	Peng, ZJ,Miao, HZ,Wang, W,Yang, S,Liu, C,&Qi, LH.(2003).Hard and wear-resistant titanium nitride films for ceramic cutting tools by pulsed high energy density plasma.SURFACE & COATINGS TECHNOLOGY,166(2-3),183.
MLA	Peng, ZJ,et al."Hard and wear-resistant titanium nitride films for ceramic cutting tools by pulsed high energy density plasma".SURFACE & COATINGS TECHNOLOGY 166.2-3(2003):183.