Fabrication technique of micro/nano-scale speckle patterns with focused ion beam

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	Fabrication technique of micro/nano-scale speckle patterns with focused ion beam
	Li, YJ ; Xie, HM ; Luo, Q ; Gu, CZ ; Hu, ZX ; Chen, PW ; Zhang, QM
刊名	SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
	2012
卷号	55 期号:6 页码:1037
关键词	DIGITAL-IMAGE-CORRELATION RESIDUAL-STRESS DEFORMATION ANALYSIS QUALITY ASSESSMENT THIN COATINGS TECHNOLOGY MECHANICS GRADIENT DEVICES FILMS
ISSN号	1674-7348
通讯作者	Xie, HM: Tsinghua Univ, Dept Engn Mech, AML, Beijing 100084, Peoples R China.
中文摘要	The fabrication technique of micro/nano-scale speckle patterns with focused ion beam (FIB) system is studied for digital image correlation (DIC) measurement under a scanning electron microscope (SEM). The speckle patterns are fabricated by directly etching the counterpart of the specimen to the black part of a template. Mean intensity gradient is used to evaluate the quality of these SEM images of speckle patterns fabricated based on different templates to select an optimum template. The pattern size depending on the displacement measurement sensitivity is adjusted by altering the magnification of FIB according to the relation curve of the etching size versus magnification. The influencing factors including etching time and ion beam current are discussed. Rigid body translation tests and rotation tests are carried out under SEM to verify the reliability of the fabricated speckle patterns. The calculated values are in good agreement with the imposed ones.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/37962]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Li, YJ,Xie, HM,Luo, Q,et al. Fabrication technique of micro/nano-scale speckle patterns with focused ion beam[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2012,55(6):1037.
APA	Li, YJ.,Xie, HM.,Luo, Q.,Gu, CZ.,Hu, ZX.,...&Zhang, QM.(2012).Fabrication technique of micro/nano-scale speckle patterns with focused ion beam.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,55(6),1037.
MLA	Li, YJ,et al."Fabrication technique of micro/nano-scale speckle patterns with focused ion beam".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 55.6(2012):1037.