Fabrication of Nanopores for Biomacromolecule Detection

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	Fabrication of Nanopores for Biomacromolecule Detection
	Yao, ZN ; Wang, KG ; Jin, AZ ; Li, JJ ; Yang, HF ; Zhang, YG ; Gu, CZ
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2010
卷号	10 期号:11 页码:7300
关键词	SINGLE-MOLECULE DETECTION SOLID-STATE NANOPORE DNA
ISSN号	1533-4880
通讯作者	Wang, KG: NW Univ Xian, Inst Photon & Photon Technol, Xian 710069, Peoples R China.
中文摘要	Nanopores embedded in a thin membrane with diameter below 10 nm are suitable for the biomacromolecule detection. For such purpose, in this study, we developed a technique of how to obtain small nanopores in silicon nitride films using a focused-ion-beam (FIB) system. By changing the process parameters, such as the beam current, the film thickness of the membrane and the ion beam exposure time, the diameter of the nanopore can be tuned. Under an optimized condition, high quality nanopores with diameter as low as 6 nm was fabricated on a 7 nm thick membrane. Our result suggests that FIB direct writing technique might be a suitable approach for biomacromolecule detector fabrication.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/37939]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Yao, ZN,Wang, KG,Jin, AZ,et al. Fabrication of Nanopores for Biomacromolecule Detection[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2010,10(11):7300.
APA	Yao, ZN.,Wang, KG.,Jin, AZ.,Li, JJ.,Yang, HF.,...&Gu, CZ.(2010).Fabrication of Nanopores for Biomacromolecule Detection.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,10(11),7300.
MLA	Yao, ZN,et al."Fabrication of Nanopores for Biomacromolecule Detection".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 10.11(2010):7300.