Active landmark configuration for accurate nano-positioning

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Active landmark configuration for accurate nano-positioning
	Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励)
	2013
会议名称	6th IFAC Symposium on Mechatronic Systems, MECH 2013
会议日期	April 10-12, 2013
会议地点	Hangzhou, China
页码	594-599
中文摘要	The spatial uncertainties of atom force microscopy (AFM) tip position hinder the AFM based nano-manipulation. Although the landmark based tip localization can be applied to improve the tip position accuracy in the task space, the PZT nonlinearity and system drift are still a challenge to compensation performance when the tip is positioned far from the landmark. Therefore this paper proposes an active landmark configuration. This method first estimates the nearby area called as the landmark domain around the target position, and then actively manipulates the landmark into the landmark domain by using virtual hand to improve the positioning accuracy. Simulation and experiment illustrate the validity of the proposed method.
收录类别	EI
产权排序	1
会议录	6th IFAC Symposium on Mechatronic Systems, MECH 2013
会议录出版者	IFAC Secretariat
会议录出版地	Laxenburg, Austria
语种	英语
ISBN号	978-3-902823-31-1
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/13899]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Yuan S,Liu LQ,Wang ZD,et al. Active landmark configuration for accurate nano-positioning[C]. 见:6th IFAC Symposium on Mechatronic Systems, MECH 2013. Hangzhou, China. April 10-12, 2013.