Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 宁波所知识产出

	Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films
	Song WJ(宋伟杰) ; Tiefeng Wei a, Yulong Zhang a, Ye Yang a, Ruiqin Tan b, Ping Cui a, Weijie Song a,⁎
刊名	Surface & Coatings Technology
	2013-04-25
期号	1 页码:201—206
通讯作者	宋伟杰
合作状况	李雨桐
中文摘要	In this work, several Al-doped ZnO thin films were sequentially deposited from a high temperature sintered sputtering target in order to understand the effect of ZnAl2O4 segregation in target on optical and electrical properties of the deposited films. It was observed that the Al-doped ZnO films were all well (002) oriented with increasing 2θ from 34.25 to 34.38°, which corresponded to the lattice shrinkage from 5.232 ？ to 5.212 ？. The corresponding band gaps for the Al-doped ZnO films increased from 3.47 eV to 3.54 eV as determined from transmittance spectra and the resistivity decreased from 3.7×10？3 Ω cm to 1.3×10？3 Ω cm. These changes were ascribed to the Al concentration increase from the polished surface to the inner target in the target due to surface segregation of ZnAl2O4 during the high temperature sintering process.
学科主题	物理化学
原文出处	SCI收录
公开日期	2013-12-16
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/9896]
专题	宁波材料技术与工程研究所_宁波所知识产出
推荐引用方式 GB/T 7714	Song WJ,Tiefeng Wei a, Yulong Zhang a, Ye Yang a, Ruiqin Tan b, Ping Cui a, Weijie Song a,⁎. Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films[J]. Surface & Coatings Technology,2013(1):201—206.
APA	Song WJ,&Tiefeng Wei a, Yulong Zhang a, Ye Yang a, Ruiqin Tan b, Ping Cui a, Weijie Song a,⁎.(2013).Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films.Surface & Coatings Technology(1),201—206.
MLA	Song WJ,et al."Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films".Surface & Coatings Technology .1(2013):201—206.