TiN/TiCN multilayer films modified by argon plasma treatment

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	TiN/TiCN multilayer films modified by argon plasma treatment
	Zheng JY(郑建云)1,2 ; Hao JY(郝俊英)1 ; Liu XQ(刘小强)1,2 ; Gong QY(龚秋雨)1,2 ; Liu WM(刘维民)1 ; Hao JY(郝俊英)
刊名	Applied Surface Science
	2013
卷号	280 页码:764-771
关键词	TiN/TiCN multilayer film Argon plasma treatment Structure Mechanical and tribological properties
ISSN号	0169-4332
通讯作者	郝俊英
英文摘要	TiN/TiCN multilayer films were deposited under direct current magnetron sputtering, and then were modified by application of an argon plasma process with an 1100 V substrate bias voltage. The combination of X-ray diffraction, field emission scanning electron microscopy and cross-sectional high resolution transmission electron microscopy was used to analyze the change of the film structure after Ar⁺ ion bombardment. It could be found that with the increase of the treatment time, the interface between the TiN layer and TiCN layer became more and more blurred and the film structure was also denser. Calculations on stress and hardness data had shown that argon plasma treatment considerably enhanced the mechanical properties of the film, which was mainly reflected in the hardness increasing from 21 GPa to 23.2 GPa, due to the creation of dense structure and fine grain. Comparison with original film, plasma-modified film exhibited substantially low friction behaviors and good wear resistance, especially the reduction of friction coefficient of TiN layer. There was a correlation between the excellent tribological properties of the film and the alteration of the film structure.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Nature Science Foundation of China (50905177);the National 973 Project of China (2013CB632300)
语种	英语
WOS记录号	WOS:000321045700114
公开日期	2013-12-18
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4764]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Hao JY(郝俊英)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Zheng JY,Hao JY,Liu XQ,et al. TiN/TiCN multilayer films modified by argon plasma treatment[J]. Applied Surface Science,2013,280:764-771.
APA	Zheng JY,Hao JY,Liu XQ,Gong QY,Liu WM,&郝俊英.(2013).TiN/TiCN multilayer films modified by argon plasma treatment.Applied Surface Science,280,764-771.
MLA	Zheng JY,et al."TiN/TiCN multilayer films modified by argon plasma treatment".Applied Surface Science 280(2013):764-771.