Vacuum tribological properties of a-C:H film in relation to internal stress and applied load

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Vacuum tribological properties of a-C:H film in relation to internal stress and applied load
	Wu YX(吴艳霞)1,2 ; Li HX(李红轩)1 ; Ji L(吉利)1 ; Ye YP(冶银平)1 ; Chen JM(陈建敏)1 ; Zhou HD(周惠娣)1 ; Chen JM(陈建敏)
刊名	Tribology International
	2014
卷号	71 页码:82-87
关键词	Amorphous hydrogenated carbon film Vacuum friction Internal stress Applied load
ISSN号	0301-679X
通讯作者	陈建敏
英文摘要	Amorphous hydrogenated carbon (a-C:H) films were deposited by medium frequency unbalanced magnetron sputteringwithAr/CH₄ gases. The microstructure and vacuum tribological properties of the films in relation to internal stress and applied load (1, 2, 4 and 5 N) were investigated. The results show that the bonded hydrogen in the film decreases and the graphitization of the film increases with increasing Ar ratio in the source gases. Meanwhile, all the films have ultra-low friction coefficients (about 0.005) but relatively short sliding lifetimes (shorter than 900 s) in vacuum. Furthermore, the film can maintain a sliding lifetime longer than 3600 s either by lower the internal stress (annealed at 200 ℃) or sliding at a small applied load (1N). It has been found that relaxation of the internal stress is the main case of the short sliding lifetime in vacuum, where as it does not occur in air under the same tested conditions.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Grant No. 51275509;51175491);the 973 Project of China (No. 2013CB632300);the Chinese Academy of Science
语种	英语
WOS记录号	WOS:000331349200009
公开日期	2013-12-05
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4509]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Chen JM(陈建敏)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Wu YX,Li HX,Ji L,et al. Vacuum tribological properties of a-C:H film in relation to internal stress and applied load[J]. Tribology International,2014,71:82-87.
APA	Wu YX.,Li HX.,Ji L.,Ye YP.,Chen JM.,...&陈建敏.(2014).Vacuum tribological properties of a-C:H film in relation to internal stress and applied load.Tribology International,71,82-87.
MLA	Wu YX,et al."Vacuum tribological properties of a-C:H film in relation to internal stress and applied load".Tribology International 71(2014):82-87.