Abrasive water jet processing technology is a processing method developed in recent decades using high energy beams, which is suitable to removal and processing different materials, because its processing  process has its own cooling effect and has incomparable advantages in other processing methods. Process  studies involving multiple materials in the same area have not been reported. In this paper, the influence  of abrasive water jet processing technology parameters on the removal rate of different materials in a  small area is studied experimentally, and the removal rate of high-purity quartz glass, doped quartz glass  and epoxy resin adhesive layer is tested by single factor and orthogonal test method. Experiments show  that within a certain range of process parameters, jet pressure, nozzle diameter and nozzle height have  obvious effects on the removal rate, while abrasive particle size have the lowest impact. Experiments are
used to derive optimal process parameters for simultaneous removal of different materials.