Effect of substrate rotational speed during deposition on the microstructure,  mechanical and tribological properties of a-C:Ta coatings

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings
	Mingming Yan 2,3; Cong Wang 2,3; Xudong Sui 1,2,3; Jian Liu 1,2,3; Yan Lu 1,2,3; Junying Hao 1,2,3; Weimin Liu 2,3
刊名	Ceramics International
	2023-04
期号	49 页码:10722–10730
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/30166]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Yan Lu; Junying Hao
作者单位	1.Qingdao Center of Resource Chemistry and New Materials, Qingdao, 266000, China 2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, China 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou, 730000, China
推荐引用方式 GB/T 7714	Mingming Yan,Cong Wang,Xudong Sui,et al. Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings[J]. Ceramics International,2023(49):10722–10730.
APA	Mingming Yan.,Cong Wang.,Xudong Sui.,Jian Liu.,Yan Lu.,...&Weimin Liu.(2023).Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings.Ceramics International(49),10722–10730.
MLA	Mingming Yan,et al."Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings".Ceramics International .49(2023):10722–10730.