The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness

doi:10.1016/j.rinp.2023.106483

CORC > 力学研究所 > 中国科学院力学研究所 > 非线性力学国家重点实验室

	The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness
	Wei CX(卫晨曦); Zhang Y(张吟)
刊名	RESULTS IN PHYSICS
	2023-07
卷号	49 页码:106483
关键词	Mass resonator Sensitivity Shape optimization Resonant frequency Beam Variable thickness
ISSN号	2211-3797
DOI	10.1016/j.rinp.2023.106483
英文摘要	The shift of resonant frequency due to the particle adsorption is the mass sensing mechanism of a micro/nano-resonator. The sensitivity and resolution are the two key performance indicators of a mass resonator. An effective method to significantly enhance the sensitivity of a mass resonator is presented. The method is realized by the design of the beam resonator thickness variation along the longitudinal direction. The analytical expression of the non-uniform resonator sensitivity and the optimization process on the thickness are given. The optimal shapes of the cantilevered and doubly clamped beam resonators are obtained by the optimization process. The sensitivities of the beam resonators in the optimal shapes are three orders of magnitude higher than those of the uniform ones. A systematic method of enhancing the sensitivity of a mass resonator through the shape optimi-zation is thus provided. The influences of the axial load on the optimization results are also discussed.
分类号	二类
WOS研究方向	WOS:000988956000001
语种	英语
资助机构	National Natural Science Foundation of China [11772335] ; Ministry of Science and Tech- nology of China [2022YFE0124700]
其他责任者	Zhang, Y
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/92280]
专题	力学研究所_非线性力学国家重点实验室
作者单位	1.(Wei Chenxi, Zhang Yin) Univ Chinese Acad Sci Sch Engn Sci Beijing 100049 Peoples R China 2.(Wei Chenxi, Zhang Yin) Chinese Acad Sci Inst Mech State Key Lab Nonlinear Mech LNM Beijing 100190 Peoples R China
推荐引用方式 GB/T 7714	Wei CX,Zhang Y. The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness[J]. RESULTS IN PHYSICS,2023,49:106483.
APA	卫晨曦,&张吟.(2023).The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness.RESULTS IN PHYSICS,49,106483.
MLA	卫晨曦,et al."The ultra-high sensitivity of mass resonator achieved by the beam with variable thickness".RESULTS IN PHYSICS 49(2023):106483.