A wide bandwidth real-time MEMS optical power meter with high resolution and linearity

doi:10.1016/j.sna.2022.113506

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	A wide bandwidth real-time MEMS optical power meter with high resolution and linearity
	X. Chen; H. R. Wang and X. Y. Wei
刊名	Sensors and Actuators a-Physical
	2022
卷号	339 页码:6
ISSN号	0924-4247
DOI	10.1016/j.sna.2022.113506
英文摘要	This paper presents a new type of wide bandwidth real-time micromechanical optical power meter based on a micro silicon disk resonator. The resonant frequency of micromechanical resonator is ultrasensitive with its heat absorption, which is verified by both simulation and experiment, including the open-loop and closed-loop testings. The resonant frequency of both the elliptical mode and contour mode of the disk resonator will shift when lasers of 488 nm and 1550 nm with different power are irradiated. The detector shows different heat absorption efficiency depending on the wavelength of the measured optical signal. The heat absorption efficiency was tested with 488 nm and 1550 nm laser irradiation in our experiments. According to our closed-loop experiments, the resolution of our detector could reach 78 nW, and a high linearity of R-2 = 0.99605 for the 488 nm target optical signal.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67246]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen,H. R. Wang and X. Y. Wei. A wide bandwidth real-time MEMS optical power meter with high resolution and linearity[J]. Sensors and Actuators a-Physical,2022,339:6.
APA	X. Chen,&H. R. Wang and X. Y. Wei.(2022).A wide bandwidth real-time MEMS optical power meter with high resolution and linearity.Sensors and Actuators a-Physical,339,6.
MLA	X. Chen,et al."A wide bandwidth real-time MEMS optical power meter with high resolution and linearity".Sensors and Actuators a-Physical 339(2022):6.