Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer

doi:10.1109/jsen.2021.3128534

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer
	M. H. Zhao; Y. H. Qi; X. P. Zhang; B. Li; Z. D. Jiang and X. Y. Wei
刊名	Ieee Sensors Journal
	2022
卷号	22 期号:1 页码:365-372
ISSN号	1530-437X
DOI	10.1109/jsen.2021.3128534
英文摘要	MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Perot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 mu g/root Hz@1 Hz to 330 ng/root Hz@1 Hz.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66908]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. H. Zhao,Y. H. Qi,X. P. Zhang,et al. Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer[J]. Ieee Sensors Journal,2022,22(1):365-372.
APA	M. H. Zhao,Y. H. Qi,X. P. Zhang,B. Li,&Z. D. Jiang and X. Y. Wei.(2022).Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer.Ieee Sensors Journal,22(1),365-372.
MLA	M. H. Zhao,et al."Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer".Ieee Sensors Journal 22.1(2022):365-372.